Defect phase diagram for doping of Ga2O3

Article English OPEN
Stephan Lany;
(2018)

For the case of n-type doping of β-Ga2O3 by group 14 dopants (C, Si, Ge, Sn), a defect phase diagram is constructed from defect equilibria calculated over a range of temperatures (T), O partial pressures (pO2), and dopant concentrations. The underlying defect levels and... View more
Share - Bookmark