Investigation of the High Mobility IGZO Thin Films by Using Co-Sputtering Method

Article, Other literature type English OPEN
Chao-Ming Hsu; Wen-Cheng Tzou; Cheng-Fu Yang; Yu-Jhen Liou;
(2015)
  • Publisher: MDPI
  • Journal: Materials,volume 8,issue 5,pages2,769-2,781 (issn: 1996-1944, eissn: 1996-1944)
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  • Related identifiers: doi: 10.3390/ma8052769, pmc: PMC5455548
  • Subject: QC120-168.85 | IGZO | SIMS | Engineering (General). Civil engineering (General) | Technology | Article | deposition power | TA1-2040 | T | co-sputtering method | Electrical engineering. Electronics. Nuclear engineering | TK1-9971 | Microscopy | QH201-278.5 | Descriptive and experimental mechanics

High transmittance ratio in visible range, low resistivity, and high mobility of IGZO thin films were prepared at room temperature for 30 min by co-sputtering of Zn2Ga2O5 (Ga2O3 + 2 ZnO, GZO) ceramic and In2O3 ceramic at the same time. The deposition power of pure In2O3... View more
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