A Study of Polycrystalline Silicon Damage Features Based on Nanosecond Pulse Laser Irradiation with Different Wavelength Effects

Article English OPEN
Xu, Jiangmin; Chen, Chao; Zhang, Tengfei; Han, Zhenchun;
(2017)
  • Publisher: MDPI AG
  • Journal: Materials,volume 10,issue 3 (issn: 1996-1944, eissn: 1996-1944)
  • Publisher copyright policies & self-archiving
  • Related identifiers: doi: 10.3390/ma10030260, pmc: PMC5503343
  • Subject: QC120-168.85 | laser wavelength | Engineering (General). Civil engineering (General) | Technology | polysilicon | Article | TA1-2040 | T | thermal shock | laser damage | Electrical engineering. Electronics. Nuclear engineering | TK1-9971 | Microscopy | QH201-278.5 | Descriptive and experimental mechanics
    arxiv: Physics::Optics

Based on PVDF (piezoelectric sensing techniques), this paper attempts to study the propagation law of shock waves in brittle materials during the process of three-wavelength laser irradiation of polysilicon, and discusses the formation mechanism of thermal shock failure... View more
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