SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods

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Anja Boisen ; Mogens Havsteen-Jakobsen ; Gabriela Blagoi ; Daniel Haefliger ; Søren Dohn ; Alicia Johansson ; Michael Lillemose ; Stephan Keller ; Maria Nordström (2008)
  • Publisher: MDPI AG
  • Journal: Sensors, volume 8, issue 3, pages 1,595-1,612 (issn: 1424-8220, eissn: 1424-8220)
  • Related identifiers: pmc: PMC3663014
  • Subject: label-free | TP1-1185 | Review | cantilever based sensing | Chemical technology | SU-8

Here, we present the activities within our research group over the last five years with cantilevers fabricated in the polymer SU-8. We believe that SU-8 is an interesting polymer for fabrication of cantilevers for bio/chemical sensing due to its simple processing and lo... View more
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