Periodically pulsed wet annealing approach for low-temperatureprocessable amorphous InGaZnO thin film transistors with high electricalperformance and ultrathin thickness

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Kim, Ye Kyun ; Ahn, Cheol Hyoun ; Yun, Myeong Gu ; Cho, Sung Woon ; Kang, Won Jun ; Cho, Hyung Koun (2016)

In this paper, a simple and controllable "wet pulse annealing" technique for the fabrication of flexible amorphous InGaZnO thin film transistors (a-IGZO TFTs) processed at low temperature (150 degrees C) by using scalable vacuum deposition is proposed. This method entai... View more
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