Self-Calibrated Humidity Sensor in CMOS without Post-Processing

Article, Other literature type English OPEN
Nizhnik, Oleg ; Higuchi, Kohei ; Maenaka, Kazusuke (2011)
  • Publisher: Molecular Diversity Preservation International (MDPI)
  • Journal: Sensors (Basel, Switzerland), volume 12, issue 1, pages 226-232 (issn: 1424-8220, eissn: 1424-8220)
  • Related identifiers: pmc: PMC3279210, doi: 10.3390/s120100226
  • Subject: TP1-1185 | capacitive sensors | microsensors | humidity measurement | Chemical technology | CMOS integrated circuits | Article

A 1.1 µW power dissipation, voltage-output humidity sensor with 10% relative humidity accuracy was developed in the LFoundry 0.15 µm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a humi... View more
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