Self-Calibrated Humidity Sensor in CMOS without Post-Processing
Article, Other literature type
- Publisher: Molecular Diversity Preservation International (MDPI)
Sensors (Basel, Switzerland),
(issn: 1424-8220, eissn: 1424-8220)
TP1-1185 | capacitive sensors | microsensors | humidity measurement | Chemical technology | CMOS integrated circuits | Article
A 1.1 µW power dissipation, voltage-output humidity sensor with 10% relative humidity accuracy was developed in the LFoundry 0.15 µm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a humi...