H., in ULSI Science and Technology / 1987, edited by S.Broydo and C.M.Osburn,

(Electrochemical Society. Pennington, NJ, 19871, PV87-11, p.805. /8/ MUROTA J., FURUNO M., KATO M.. MIKOSHIBA N., ON0 S., KUROKAWA H., SATO T.,

Meeting, Seattle, Washington, Oct.14-19, 1990, Abs.No.399, p.576. /9/ YABUMOTO N., MINEGISHI K., SAITO K. MORITA M. and T.OHM1, in Semiconductor

Cleaning Technology / 1989, edited by J.Ruzyllo and R.E.Novak, (The Electro-

chemical Society, Pennington, NJ, 1989), PU90-5, p.265. /lo/ KATO M., SATO T.. MIJROTA 5. AND MIKOSHIBA N., J.Crysta1 Growth 99. (1990)240. /11/ MUROTA J., KOBAYASHI S., KATO M.. MIKOSHIBA N. and ON0 S., Proc. 11th Int.

NJ, 1990). PV.90-12, p.325. /12/ TAMARU K. and BOUDART M.. Advan.Catalysis 9. (1957)699. /13/ ISHITANI A., TAKADA T. and OHSHITA Y., J.Appl.Phys. 63, (19881390. /14/ MUROTA J.. The Electrochemical Society Extended Abstracts. Fall Meeting,

Detroit. Oct. 17-21, 1982. Abs.No.226, p.363. /15/ KATO M.. CHENG M.-L., IWASAKI C., MUROTA J., MIKOSHIBA N. and ON0 S., Proc.

NJ, 1990). PV.90-12, p.240. /16/ KOBAYASHI S., CHENG M.-L., KOHLHASE A., SATO T., MUROTA J. and MIKOSHIBA N.,

J.Crysta1 Growth 99. (1990)259.