Determination of Temperature-Dependent Stress State in Thin AlGaN Layer of AlGaN/GaN HEMT Heterostructures by Near-Resonant Raman Scattering

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Liu, Yanli; Yang, Xifeng; Chen, Dunjun; Lu, Hai; Zhang, Rong; Zheng, Youdou;
(2015)
  • Publisher: Hindawi Publishing Corporation
  • Journal: Advances in Condensed Matter Physics (issn: 1687-8108)
  • Related identifiers: doi: 10.1155/2015/918428
  • Subject: Article Subject
    arxiv: Condensed Matter::Materials Science

The temperature-dependent stress state in the AlGaN barrier layer of AlGaN/GaN heterostructure grown on sapphire substrate was investigated by ultraviolet (UV) near-resonant Raman scattering. Strong scattering peak resulting from the A1(LO) phonon mode of AlGaN is obser... View more
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