Optimized design of micromachined electric field mills to maximize electrostatic field sensitivity

Article English OPEN
Yu Zhou; Cyrus Shafai; (2016)
  • Publisher: Elsevier
  • Journal: Sensing and Bio-Sensing Research,volume 9,pages31-37 (issn: 2214-1804)
  • Related identifiers: doi: 10.1016/j.sbsr.2016.05.005
  • Subject: TA1-2040 | Engineering (General). Civil engineering (General)
    arxiv: Physics::Instrumentation and Detectors | Computer Science::Other

This paper describes the design optimization of a micromachined electric field mill, in relation to maximizing its output signal. The cases studied are for a perforated electrically grounded shutter vibrating laterally over sensing electrodes. It is shown that when mode... View more
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