Optimized design of micromachined electric field mills to maximize electrostatic field sensitivity

Article English OPEN
Zhou, Yu; Shafai, Cyrus;
(2016)

This paper describes the design optimization of a micromachined electric field mill, in relation to maximizing its output signal. The cases studied are for a perforated electrically grounded shutter vibrating laterally over sensing electrodes. It is shown that when mode... View more
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