Nouvelle filière technologique de circuits micro-ondes coplanaires à faibles pertes et à faible dispersion sur membrane composite d'oxyde et de nitrure de silicium

Doctoral thesis French OPEN
Saint-Etienne, Eric; (1998)
  • Publisher: HAL CCSD
  • Subject: Micromachining | Microwaves | Technologie | Dépôt électrochimique | [ SPI.NANO ] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics | Hyperfréquences | Dielectric membrane | Silicium | Membrane diélectrique | Technology | Millimeter waves | [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics | Moule de résine photosensible | Electro-chemical deposition | Micro-usinage | Photolithographie | Photolithography | Silicon | Photoresist mould | Guides coplanaires | Ondes millimétriques | Coplanar circuits

This memoir treats of the elaboration and validation of a new manufacturing process for microwave circuits. Chapter I shows the advantages of coplanar-type structures and the possibility of minimizing losses and frequency dispersion by replacing the wafer with a membran... View more
Share - Bookmark