Effects of phase change on reflection in phase-measuring interference microscopy

Article English OPEN
Dubois, Arnaud;
(2004)
  • Publisher: Optical Society of America
  • Subject: [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics]
    arxiv: Astrophysics::Instrumentation and Methods for Astrophysics

International audience; We show by analytical and numerical calculations that the phase change on reflection that occurs in interference microscopy is almost independent of the numerical aperture of the objective. The shift of the microscope interferogram response due t... View more
  • References (23)
    23 references, page 1 of 3

    1. B. Bhushan, J. C. Wyant, and C. L. Koliopoulos, “Measurements of surface topography of magnetic tapes by Mirau interferometry,” Appl. Opt. 24, 1489 -1497 1985 .

    2. F. Laeri and T. C. Strand, “Angstro¨m resolution optical profilometry for microscopic objects,” Appl. Opt. 26, 2245-2249 1987 .

    3. K. Creath, Progress in Optics XXVI, E. Wolf, ed. Elsevier, New York, 1988 .

    4. J. M. Bennett, “Precise method for measuring the absolute phase change on reflection,” J. Opt. Soc. Am. 54, 612- 624 1964 .

    5. T. McWaid, T. Vorburger, J. F. Song, and D. ChandlerHorowitz, “The effect of thin films on interferometric step height measurements,” in Interferometry: Surface Characterization and Testing, K. Creath and J. E. Greivenkamp, eds., Proc. SPIE 1776, 2-13 1992 .

    6. T. Doi, K. Toyoda, and Y. Tanimura, “Effect of phase changes on reflection and their wavelength dependence in optical profilometry,” Appl. Opt. 36, 7157-7161 1997 .

    7. K. Leonhardt, H. J. Jordan, and H. J. Tiziani, “Micro-ellipso height profilometry,” Opt. Commun. 80, 205-209 1991 .

    8. J. F. Biegen, “Determination of the phase change on reflection from two-beam interference,” Opt. Lett. 19, 1690 -1693 1994 .

    9. S. Shatalin, R. Juskaitis, J. B. Tan, and T. Wilson, “Reflection conoscopy and microellipsometry of isotropic thin film structures,” J. Microsc. 179, 241-252 1995 .

    10. C. W. See, M. G. Somekh, and R. D. Holmes, “Scanning optical microellipsometer for pure surface profiling,” Appl. Opt. 35, 6663- 6668 1996 .

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