Development of at-wavelength metrology using grating-based shearing interferometry at Diamond Light Source

Conference object English OPEN
Wang, H. ; Bérujon, S. ; Sawhney, K. (2013)
  • Publisher: HAL CCSD
  • Journal: Journal of Physics : Conference Series (issn: 1742-6588, vol: 425, pp: 052021-1-052021-4)
  • Related identifiers: doi: 10.1088/1742-6596/425/5/052021
  • Subject: [ PHYS ] Physics [physics]

International audience; The grating-based shearing interferometer has been established and further developed on B16 at Diamond Light Source. The beamline performances of both an X-ray plane mirror and a compound refractive lens (CRL) have been investigated using this technique. The slope error of the X-ray mirror was retrieved from the wavefront phase gradient, which was measured using two different processing schemes: phase stepping and moire fringe analysis. The interferometer has demonstrated a high sensitivity with sub-microradian accuracy. Some of the advantages, disadvantages and limitations for the two approaches will also be presented
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