Thermal annealing of amorphous Ti-Si-O thin films

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Hodroj , Abbas; Chaix-Pluchery , Odette; Audier , Marc; Gottlieb , Ulrich; Deschanvres , Jean-Luc;
  • Publisher: Cambridge University Press (CUP)
  • Related identifiers: doi: 10.1557/JMR.2008.0088
  • Subject: Mictamict | aerosol CVD | multilayered structure | [ CHIM.MATE ] Chemical Sciences/Material chemistry | Ti-Si-O films

International audience; Ti-Si-O thin films were deposited using an aerosol chemical vapor deposition process at atmospheric pressure. The film structure and microstructure were analysed using several techniques before and after thermal annealing. Diffraction results ind... View more
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