publication . Article . Other literature type . 2016

Unbalanced Cylindrical Magnetron for Accelerating Cavities Coating

G. Rosaz; V. Semblanet; S. Calatroni; A. Sublet; M. Taborelli;
Open Access English
  • Published: 03 May 2016
  • Publisher: Int. J. Chem. Mol. Nucl. Mater. Metall. Eng.
Abstract
We report in this paper the design and qualification of a cylindrical unbalanced magnetron source. The dedicated magnetic assemblies were simulated using a finite element model. A hall-effect magnetic probe was then used to characterize those assemblies and compared to the theoretical magnetic profiles. These show a good agreement between the expected and actual values. The qualification of the different magnetic assemblies was then performed by measuring the ion flux density reaching the surface of the sample to be coated using a commercial retarding field energy analyzer. The strongest unbalanced configuration shows an increase from 0.016 A.cm<sup>-2</sup> to ...
Subjects
free text keywords: Accelerators and Storage Rings, Innovative Radio Frequency Technologies (RF) [12], Coordination and Communication [12.1], Ion energy distribution, niobium, retarding field energy analyzer, sputtering, SRF cavity, unbalanced magnetron.
Funded by
EC| EUCARD-2
Project
EUCARD-2
Enhanced European Coordination for Accelerator Research & Development
  • Funder: European Commission (EC)
  • Project Code: 312453
  • Funding stream: FP7 | SP4 | INFRA
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Article . 2016
Provider: ZENODO
Zenodo
Other literature type . 2016
Provider: Datacite
Zenodo
Other literature type . 2016
Provider: Datacite
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