Microfabrication of pre-aligned fiber bundle couplers using ultraviolet lithography of SU-8

Article, Other literature type English OPEN
Yang, Ren; Soper, Steven A.; Wang, Wanjun;

This paper describes the design, microfabrication and testing of a pre-aligned array of fiber couplers using direct UV-lithography of SU-8. The fiber coupler array includes an out-of-plane refractive microlens array and two fiberport collimator arrays. With the optical ... View more
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