Modal Decomposition in Goalpost Micro/nano Electro-mechanical Devices

Article, Preprint English OPEN
Collin , Eddy; Defoort , Martial; Lulla , Kunal; Blanc , Christophe; Guidi , Jean; Dufresnes , Sébastien; Bourgeois , Olivier; Godfrin , Henri;
(2014)
  • Publisher: Springer Verlag (Germany)
  • Related identifiers: doi: 10.1007/s10909-013-0919-1
  • Subject: micro/nano-mechanics | dynamics | [PHYS.COND.CM-MSQHE]Physics [physics]/Condensed Matter [cond-mat]/Mesoscopic Systems and Quantum Hall Effect [cond-mat.mes-hall] | [ PHYS.COND.CM-MSQHE ] Physics [physics]/Condensed Matter [cond-mat]/Mesoscopic Systems and Quantum Hall Effect [cond-mat.mes-hall] | Condensed Matter - Mesoscale and Nanoscale Physics | resonance modes

International audience; We have studied the first three symmetric out-of-plane flexural resonance modes of a goalpost silicon micro-mechanical device. Measurements have been performed at 4.2K in vacuum, demonstrating high Qs and good linear properties. Numerical simulatio... View more
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