Modal Decomposition in Goalpost Micro/nano Electro-mechanical Devices

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Collin, Eddy; Defoort, Martial; Lulla, Kunal; Blanc, Christophe; Guidi, Jean; Dufresnes, Sébastien; Bourgeois, Olivier; Godfrin, Henri;
  • Publisher: Springer Verlag (Germany)
  • Related identifiers: doi: 10.1007/s10909-013-0919-1
  • Subject: micro/nano-mechanics | dynamics | [PHYS.COND.CM-MSQHE]Physics [physics]/Condensed Matter [cond-mat]/Mesoscopic Systems and Quantum Hall Effect [cond-mat.mes-hall] | [ PHYS.COND.CM-MSQHE ] Physics [physics]/Condensed Matter [cond-mat]/Mesoscopic Systems and Quantum Hall Effect [cond-mat.mes-hall] | Condensed Matter - Mesoscale and Nanoscale Physics | resonance modes

International audience; We have studied the first three symmetric out-of-plane flexural resonance modes of a goalpost silicon micro-mechanical device. Measurements have been performed at 4.2K in vacuum, demonstrating high Qs and good linear properties. Numerical simulatio... View more
  • References (11)
    11 references, page 1 of 2

    1. A.M. Gue´nault, V. Keith, C.J. Kennedy, S.G. Mussett and G.R. Pickett, J. of Low Temp. Phys. 62, p. 511 (1986).

    2. J. Ja¨ger, B. Schuderer and W. Schoepe, Phys. Rev. Lett. 74, 566 (1995).

    3. R. Blaauwgeers, M. Blazkova, M. Clovecko, V. B. Eltsov, R. de Graaf, J. Hosio, M. Krusius, D. Schmoranzer, W. Schoepe, L. Skrbek, P. Skyba, R. E. Solntsev et D. E. Zmeev, J. Low Temp. Phys., 146, Numbers 5-6, (march 2007). DOI: 10.1007/s10909-006-9279-4

    4. S. Triqueneaux, E. Collin, D. J. Cousins, T. Fournier, C. Ba¨uerle, Yu. M. Bunkov and H. Godfrin, Physica B 284, p. 2141-2142 (2000).

    5. E. Collin, L. Filleau, T. Fournier, Yu. M. Bunkov and Henri Godfrin, J. of Low Temp. Phys. 150, p. 739-790 (2008); Erratum 157, p. 566 (2009).

    6. E. Collin, J. Kofler, J.-S. Heron, O. Bourgeois, Yu. M. Bunkov and H. Godfrin, J. of Low Temp. Phys. 158, 678 (2010).

    7. K. J. Lulla, R. B. Cousins, A. Venkatesan, M. J. Patton, A. D. Armour, C. J. Mellor and J. R. Owers-Bradley, New Journal of Physics 14, 113040 (2012).

    8. ANSYS R Multiphysics engineering calculation platform.

    9. J. J. Wortman and R. A. Evans, J. Appl. Phys. 36, 153-156 (1965). Note that at low temperatures the elastic constants are slighlty larger than at 300 K.

    10. A. N. Cleland, Foundations of Nanomechanics, Springer (2003).

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