Manufacture of Radio Frequency Micromachined Switches with Annealing

Article, Other literature type English OPEN
Cheng-Yang Lin; Ching-Liang Dai;

The fabrication and characterization of a radio frequency (RF) micromachined switch with annealing were presented. The structure of the RF switch consists of a membrane, coplanar waveguide (CPW) lines, and eight springs. The RF switch is manufactured using the complemen... View more
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