A Standard CMOS Humidity Sensor without Post-Processing

Article, Other literature type English OPEN
Nizhnik, Oleg ; Higuchi, Kohei ; Maenaka, Kazusuke (2011)
  • Publisher: Molecular Diversity Preservation International (MDPI)
  • Journal: Sensors (Basel, Switzerland), volume 11, issue 6, pages 6,197-6,202 (issn: 1424-8220, eissn: 1424-8220)
  • Related identifiers: doi: 10.3390/s110606197, pmc: PMC3231417
  • Subject: TP1-1185 | capacitive sensors | microsensors | humidity measurement | Chemical technology | CMOS integrated circuits | Article

A 2 µW power dissipation, voltage-output, humidity sensor accurate to 5% relative humidity was developed using the LFoundry 0.15 µm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a Inter... View more
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