A Standard CMOS Humidity Sensor without Post-Processing

Article, Other literature type English OPEN
Oleg Nizhnik; Kazusuke Maenaka; Kohei Higuchi;

A 2 µW power dissipation, voltage-output, humidity sensor accurate to 5% relative humidity was developed using the LFoundry 0.15 µm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a Inter... View more
  • References (8)

    1. Silverthorne, S.V.; Watson, C.W.; Baxter, R.D. Integrated Relative Humidity Sensor, Technique Digest. In Proceedings of IEEE Solid-state Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 6-9 June 1998; pp. 67-71.

    2. Okcan, B.; Akin, T. A Low-Power Robust Humidity Sensor in a Standard CMOS Process. IEEE Trans. Electron Devices 2007, 54, 3071-3078.

    3. Baglio, S.; Castorina, S.; Sacco, V.; Savalli, N.; Tringali, C. Dew-point Relative Humidity CMOS Microsensors. In Proceedings of 2004 IEEE Sensors, Vienna, Austria, 24-27 October 2004; pp. 103-106.

    4. SHT1x/SHT7x Humidity & Temperature Sensor; Sensirion Technical Report Datasheet; Sensirion AG: Staefa, Switzerland, March 2003.

    5. Zhao, C.-L.; Huang, H.-A.; Qin, M.; Li, W.H. A CMOS Interdigital Capacitive Humidity Sensor with Polysilicon Heaters. In Proceedings of 2010 IEEE Sensors, Kona, HI, USA, 1-4 November 2010; pp. 382-385.

    6. Laconte, J.; Wilmart, V.; Raskin, J.-P.; Flandre, D. Capacitive Humidity Sensor Using a Polyimide Sensing Film. In Proceedings of Design, Test, Integration & Packaging of MEMS/MOEMS, Aix-en-Provence, France, 11-13 May 2011; pp. 223-228.

    7. Dai, C.-L.; Lu, D.-H. Fabrication of a Micro Humidity Sensor with Polypyrrole Using the CMOS Process. In Proceedings of 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Xiamen, China, 20-23 January 2010; pp. 110-113.

    Kodama, R.; Miyao, H.; Sawada, K.; Ishida, M.; Takao, H. Highly Sensitive Micro Force Sensor Array with In-pixel Type CV Conversion Circuits. In Proceedings of 27th Conference on the Electrical Engineering and Micromachining, Matsue, Japan, 14-15 October 2010; pp. 161-166.

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