Solid on liquid deposition, a review of technological solutions

Article English OPEN
Homsy, Alexandra; Laux, Edith; Jeandupeux, Laure; Charmet, Jerome; Bitterli, Roland; Botta, Chiara; Rebetez, Yves; Banakh, Oksana; Keppner, H.;
(2015)
  • Publisher: Elsevier BV
  • Journal: Microelectronic Engineering,volume 141,pages267-279 (issn: 0167-9317)
  • Publisher copyright policies & self-archiving
  • Related identifiers: doi: 10.1016/j.mee.2015.03.068
  • Subject: QC | Condensed Matter Physics | Surfaces, Coatings and Films | Electrical and Electronic Engineering | Electronic, Optical and Magnetic Materials | Atomic and Molecular Physics, and Optics

Solid-on-liquid deposition (SOLID) techniques are of great interest to the MEMS and NEMS (Micro- and Nano Electro Mechanical Systems) community because of potential applications in biomedical engineering, on-chip liquid trapping, tunable micro-lenses, and replacements o... View more
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