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Pavageau , S.; Tessier , G.; Filloy , C.; Jerosolimski , G.; Fournier , D.; Polignano , M.-L.; Mica , I.; Cassette , S.; Aubry , R.; Durand , O.;
  • Publisher: TIMA Editions
  • Subject: thermoreflectance | [INFO.INFO-AR]Computer Science [cs]/Hardware Architecture [cs.AR] | Thermal mapping | [ INFO.INFO-AR ] Computer Science [cs]/Hardware Architecture [cs.AR] | thermal imaging

Submitted on behalf of EDA Publishing Association (; International audience; Within the european project Microtherm, we have developed a CCD-based thermoreflectance system which delivers thermal images of working integrated circu... View more
  • References (6)

    [1] V. Quintard, G. Deboy, S. Dilhaire, D. Lewis, T. Phan and W. Claeys, "Laser beam thermography of circuits in the particular case of passivated semiconductors", Microelectronic Engineering, 31, 291-298, 1996

    [2] G. Tessier, G. Jerosolimski, S. Hole, D. Fournier and C. Filloy, "Measuring and predicting the thermoreflectance sensitivity as a function of wavelength on encapsulated materials", Review of Scientific Instruments, 74, 495-499, 2003

    [3] I. Mica, M. L. Polignano, G. P. Carnevale, A. Armigliato, R. Balboni, M. Brambilla, F. Cazzaniga, G. Pavia and V. Soncini, "Dislocation generation in device fabrication process", Gettering and Defect Engineering in Semiconductor Technology, 95-96, 439-445, 2004

    [4] I. Mica, M. L. Polignano, G. Carnevale, P. Ghezzi, M. Brambilla, F. Cazzaniga, M. Martinelli, G. Pavia and E. Bonera, "Crystal defects and junction properties in the evolution of device fabrication technology", Journal of Physics-Condensed Matter, 14, 13403-13410, 2002

    [5] P. S. Dobson, G. Mills and J. M. R. Weaver, "Microfabricated temperature standard based on Johnson noise measurement for the calibration of micro- and nano-thermometers", Review of Scientific Instruments, 76, -, 2005

    [6] C. Filloy, G. Tessier, S. Hole, G. Jerosolimski and D. Fournier, "The contribution of thermoreflectance to high resolution thermal mapping", Sensor Review, 23, 35, 2003

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