On the Origin of Light Emission in Silicon Rich Oxide Obtained by Low-Pressure Chemical Vapor Deposition

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M. Aceves-Mijares; A. A. González-Fernández; R. López-Estopier; A. Luna-López; D. Berman-Mendoza; A. Morales; C. Falcony; C. Domínguez; R. Murphy-Arteaga;

Silicon Rich Oxide (SRO) has been considered as a material to overcome the drawbacks of silicon to achieve optical functions. Various techniques can be used to produce it, including Low-Pressure Chemical Vapor Deposition (LPCVD). In this paper, a brief description of th... View more
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