Ultrathin Oxide Passivation Layer by Rapid Thermal Oxidation for the Silicon Heterojunction Solar Cell Applications

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Youngseok Lee; Woongkyo Oh; Vinh Ai Dao; Shahzada Qamar Hussain; Junsin Yi;
(2012)

It is difficult to deposit extremely thin a-Si:H layer in heterojunction with intrinsic thin layer (HIT) solar cell due to thermal damage and tough process control. This study aims to understand oxide passivation mechanism of silicon surface using rapid thermal oxidatio... View more
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