1900 V, 1.6 mΩ cm2 AlN/GaN-on-Si power devices realized by local substrate removal

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Herbecq , Nicolas; Roch-Jeune , Isabelle; Rolland , Nathalie; Visalli , Domenica; Derluyn , Joff; Degroote , Stefan; Germain , Marianne; Medjdoub , Farid;
(2014)

International audience; We demonstrate a high-voltage low on-resistance AlN/GaN/AlGaN double heterostructure grown by metal-organic chemical vapor deposition on a silicon (111) substrate using a total buffer thickness of less than 2 μm. A fully scalable local substrate ... View more
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