Robust design of subwavelength grating mirror for mid-infrared VCSEL application

Conference object English OPEN
Chevallier , Christyves ; Genty , Frédéric ; Fressengeas , Nicolas ; Jacquet , Joel (2011)
  • Publisher: HAL CCSD
  • Related identifiers: doi: 10.1109/NUSOD.2011.6041173
  • Subject: [ PHYS.PHYS.PHYS-OPTICS ] Physics [physics]/Physics [physics]/Optics [physics.optics]

Oral Presentation - The final publication is available at; International audience; We present the design of a Si/Si3N4 subwavelength grating mirror optimized for an integration in mid-infrared VCSEL. The definition of a quality factor adapted to VCSEL requirements and maximized by an optimization algorithm allowed us to obtain a polarization selective and high reflectivity structure. The robustness with respect to fabrication error has been enhanced thanks to a precise study of the grating dimension tolerances.
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