Robust design of subwavelength grating mirror for mid-infrared VCSEL application
Chevallier , Christyves
Genty , Frédéric
Fressengeas , Nicolas
Jacquet , Joel
- Publisher: HAL CCSD
[ PHYS.PHYS.PHYS-OPTICS ] Physics [physics]/Physics [physics]/Optics [physics.optics]
Oral Presentation - The final publication is available at http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=6041173; International audience; We present the design of a Si/Si3N4 subwavelength grating mirror optimized for an integration in mid-infrared VCSEL. The definition of a quality factor adapted to VCSEL requirements and maximized by an optimization algorithm allowed us to obtain a polarization selective and high reflectivity structure. The robustness with respect to fabrication error has been enhanced thanks to a precise study of the grating dimension tolerances.