A low-power-consumption out-of-Plane electrothermal actuator

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Girbau Sala, David; Llamas Morote, Marco Antonio; Casals Terré, Jasmina; Simó Selvas, Francisco Javier; Pradell i Cara, Lluís; Lázaro Guillén, Antoni;
(2007)
  • Publisher: IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
  • Subject: parallel-plate capacitors | Finite-element analysis | Low-power-consumption | :Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Circuits de microones, radiofreqüència i ones mil·limètriques [Àrees temàtiques de la UPC] | Microelectromechanical systems | Finite element analysis | MEMS | Microactuators | In-plane buckle-beam actuator | Capacitors | Vertical hot-cold actuator | Electrothermal actuator | Low-power electronics
    arxiv: Computer Science::Robotics | Computer Science::Other

This paper proposes a new vertical electrothermal actuator. It can be considered as a hybrid between the traditional in-plane buckle-beam actuator and the vertical hot-cold actuator. It is here referred to as vertical buckle beam. At identical dimensional and bias condi... View more
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