Fully Automated Concentration Control of the Acidic Texturisation Process

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Dannenberg, T.; Zimmer, M.; Rentsch, J.;

To enable a concentration control in the acidic texturing process we have closed the feedback loop from analytical data to the dosing mechanism of the used process tool. In order to analyze the process bath we used near-infrared spectroscopy in an online setup as well a... View more
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