Controlled formation of anatase and rutile TiO2 thin films by reactive magnetron sputtering

Article English OPEN
Rafieian Boroujeni, Damon ; Ogieglo, Wojciech ; Savenije, Tom ; Lammertink, Rob G.H. (2015)
  • Publisher: AIP Publishing LLC
  • Journal: AIP Advances (issn: 2158-3226)
  • Related identifiers: doi: 10.1063/1.4931925
  • Subject: Physics | QC1-999

We discuss the formation of TiO2 thin films via DC reactive magnetron sputtering. The oxygen concentration during sputtering proved to be a crucial parameter with respect to the final film structure and properties. The initial deposition provided amorphous films that cr... View more
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