Controlled formation of anatase and rutile TiO2 thin films by reactive magnetron sputtering

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Damon Rafieian; Wojciech Ogieglo; Tom Savenije; Rob G. H. Lammertink;

We discuss the formation of TiO2 thin films via DC reactive magnetron sputtering. The oxygen concentration during sputtering proved to be a crucial parameter with respect to the final film structure and properties. The initial deposition provided amorphous films that cr... View more
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