Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis

Article, Other literature type English OPEN
Toffoli, Valeria; Carrato, Sergio; Lee, Dongkyu; Jeon, Sangmin; Lazzarino, Marco; (2013)
  • Publisher: Molecular Diversity Preservation International (MDPI)
  • Journal: Sensors (Basel, Switzerland),volume 13,issue 12,pages16,657-16,671 (issn: 1424-8220, eissn: 1424-8220)
  • Related identifiers: pmc: PMC3892878, doi: 10.3390/s131216657
  • Subject: TP1-1185 | microelectromechanical system (MEMS) resonator | mass sensing | microcapsules | Chemical technology | thermogravimetric analysis (TGA) | Article

The design and characteristics of a micro-system for thermogravimetric analysis (TGA) in which heater, temperature sensor and mass sensor are integrated into a single device are presented. The system consists of a suspended cantilever that incorporates a microfabricated... View more
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