Novel "vibrating wire like" NEMS and MEMS structures for low temperature physics

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Collin , Eddy; Kofler , J.; Heron , Jean-Savin; Bourgeois , Olivier; Bunkov , Yuriy M.; Godfrin , Henri;
  • Publisher: Springer Verlag (Germany)
  • Related identifiers: doi: 10.1007/s10909-009-9960-5
  • Subject: [ PHYS.COND.CM-MSQHE ] Physics [physics]/Condensed Matter [cond-mat]/Mesoscopic Systems and Quantum Hall Effect [cond-mat.mes-hall]

International audience; Using microfabrication techniques, it has become possible to make mechanical devices with dimensions in the micro and even in the nano scale domain. Allied to low temperature techniques, these systems have opened a new path in physics with the ul... View more
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