Influence of plasma density and plasma sheath dynamics on the ion implantation by plasma immersion technique

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Rauschenbach, Bernd (Prof.);
(1996)

Influence of plasma density and plasma sheath dynamics on the ion implantation by plasma immersion technique / B. Rauschenbach ... - In: Nuclear instruments and methods in physics research. B. 113. 1996. S. 266-269
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