A „Hybrid“ Thin-Film pH Sensor with Integrated Thick-Film Reference

Article, Other literature type English OPEN
Michael J. Schöning; Joseph Wang; Hans Lüth; Thomas Krings; Anette Simonis;
(2001)

A reference electrode fabricated by means of thick-film technique is deposited onto a silicon substrate and combined with a thin-film pH sensor to a “hybrid†chip system. To evaluate the suitability of this combination, first investigations were carried out. Th... View more
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