Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications

Article English OPEN
Fu, Yong Qing ; Luo, Jack ; Nguyen, Nam-Trung ; Walton, Anthony ; Flewitt, Andrew ; Zu, Xiao-Tao ; Li, Yifan ; McHale, Glen ; Matthews, Allan ; Iborra, Enrique ; Du, Hejun ; Milne, William (2017)
  • Publisher: Elsevier
  • Journal: (issn: Progress in materials science, ISSN 0079-6425, 2017-04-24, No. 89)
  • Related identifiers: doi: 10.17863/CAM.10050, doi: 10.1016/j.pmatsci.2017.04.006
  • Subject: AlN | Biosensor | Acoustic wave | Piezoelectric | Electrónica | Materials Science(all) | Lab-on-chip | /dk/atira/pure/subjectarea/asjc/2500 | Thin film | Telecomunicaciones | ZnO | Acoustofluidics | Microfluidics | H600

Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN) have found a broad range of lab-on-chip applications such as biosensing, particle/cell concentrating, sorting/patterning, pumping, mixing, nebulisation and jetting. Integrated acou... View more