Tunable, Source-Controlled Formation of Platinum Silicides and Nanogaps from Thin Precursor Films

Article English OPEN
Streller, F; Wabiszewski, GE; Mangolini, F; Feng, G; Carpick, RW;
(2014)
  • Publisher: Wiley

Platinum silicide thin films are ideal for electromechanical applications. Here, films are formed from thin bilayers of amorphous silicon and platinum for the first time. Simply changing the thickness ratio of the two materials in the bilayer allows the final film stoic... View more
  • References (15)
    15 references, page 1 of 2

    [8] R. H. Blick, H. Qin, H.-S. Kim, R. Marsland, New J Phys. 2007, 9, 241.

    [9] S.-W. Lee, R. Johnstone, A. M. Parameswaran, presented at CAN CON EL COMP EN, Saskatoon, Canada, (May, 2005)

    [10] M. N. Lovellette, A. B. Campbell, H. L. Hughes, R. K. Lawrence, J. W. Ward, M. Meinhold, T. R. Bengtson, G. F. Carleton, B. M. Segal, T. Rueckes, presented at AEROSP CONF PROC, Big Sky, Montana, USA (March, 2004)

    [11] R. A. Coutu, P. E. Kladitis, K. D. Leedy, R. L. Crane, J Micromech Microeng. 2004, 14, 1157.

    [12] Z. Yang, D. J. Lichtenwalner, A. S. Morris, J. Krim, A. I. Kingon, J Microelectromech S. 2009, 18, 287.

    [13] H. Kam, E. Alon, T.-J. K. Liu, presented at INT EL DEVICES MEET, San Francisco, California, USA (December, 2010).

    [14] K. W. Gilbert, S. Mall, K. D. Leedy, J Adhes Sci Technol. 2010, 24, 2597. [15] C. Brown, O. Rezvanian, M. A. Zikry, J. Krim, J Micromech Microeng. 2009, 19, 025006.

    [16] V. Brand, M. S. Baker, M. P. de Boer, Tribol Lett. 2013, 51, 341. [17] D. A. Czaplewski, C. D. Nordquist, C. W. Dyck, G. A. Patrizi, G. M. Kraus, W. D. Cowan, J Micromech Microeng. 2012, 22, 105005.

    [18] H. Lee, R. A. Coutu, S. Mall, K. D. Leedy, J Micromech Microeng. 2006, 16, 557.

    [19] H. Kwon, D. J. Choi, J. H. Park, H. C. Lee, Y. H. Park, Y. D. Kim, H. J. Nam, Y. C. Joo, J. U. Bu, presented at PROC IEEE MICR ELECT, Hyogo, Japan (January, 2007).

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