AlScN thin film based surface acoustic wave devices with enhanced microfluidic performance

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Wang, Wenbo ; Fu, Yong Qing ; Chen, Jinju ; Xuan, Weipeng ; Chen, Jinkai ; Mayrhofer, Paul ; Duan, Pengfei ; Bittner, Elmar ; Luo, Jikui (2016)

This paper reports the characterization of scandium aluminum nitride (Al1−x Sc x N, x  =  27%) films and discusses surface acoustic wave (SAW) devices based on them. Both AlScN and AlN films were deposited on silicon by sputtering and possessed columnar microstructures ... View more
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