AlScN thin film based surface acoustic wave devices with enhanced microfluidic performance
Fu, Yong Qing
- Publisher: IOP Science
This paper reports the characterization of scandium aluminum nitride (Al1−x Sc x N, x = 27%) films and discusses surface acoustic wave (SAW) devices based on them. Both AlScN and AlN films were deposited on silicon by sputtering and possessed columnar microstructures ...
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