A new monolithic approach for mid-IR focal plane arrays

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Xie, Chengzhi; Pusino, Vincenzo; Khalid, Ata; Aziz, Mohsin; Steer, Matthew J.; Cumming, David R.S.;
(2016)
  • Publisher: Society of Photo-optical Instrumentation Engineers

Antimonide-based photodetectors have recently been grown on a GaAs substrate by molecular beam epitaxy (MBE) and reported to have comparable performance to the devices grown on more expensive InSb and GaSb substrates. We demonstrated that GaAs, in addition to providing ... View more
  • References (16)
    16 references, page 1 of 2

    [1] A. Krier, Mid-infrared semiconductor optoelectronics. London: Springer, 2006.

    [2] M. Razeghi and B. Nguyen, "Advances in mid-infrared detection and imaging: a key issues review", Rep. Prog. Phys., vol. 77, no. 8, p. 082401, 2014.

    [3] X. Zhang, Q. Meng, L. Zhang and Y. Lv, "Modeling and deformation analyzing of InSb focal plane arrays detector under thermal shock", Infrared Physics & Technology, vol. 63, pp. 28-34, 2014.

    [4] A. Rogalski, "Infrared detectors: status and trends", Progress in Quantum Electronics, vol. 27, no. 2-3, pp. 59- 210, 2003.

    [5] D. Pocock, C. Chen, J. Underwood and E. Dillard, "Monolithic InSb Charge Injection Device (CID) Technology", Staring Infrared Focal Plane Technology, 1981.

    [6] M. Wadsworth, S. Borrello, J. Dodge, R. Gooch, W. McCardel, G. Nado and M. Shilhanek, "Monolithic CCD imagers in HgCdTe", IEEE Trans. Electron Devices, vol. 42, no. 2, pp. 244-250, 1995.

    [7] M. Kinch, State-of-the-art infrared detector technology, Chapter 1.

    [8] C. Xie, V. Pusino, A. Khalid, M. J. Steer, M. Sorel, I. G. Thayne, and D. R. S. Cumming, “Monolithic Integration of an Active InSb-based Mid-Infrared Photopixel With a GaAs MESFET”, IEEE Transactions on Electron Devices, vol. 62, no. 12, Dec. 2015.

    [9] T. Ashley, A. Dean, C. Elliott, C. McConville, G. Pryce and C. Whitehouse, “Ambient temperature diodes and field-effect transistors in InSb/In1-x AlxSb”, Applied Physics Letters, vol. 59, no. 14, pp. 1761-1763,1991.

    [10] V. Pusino, C. Xie, A. Khalid, I. Thayne and D. Cumming, "Development of InSb dry etch for mid-IR applications", Microelectronic Engineering, vol. 153, pp. 11-14, 2016.

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