Energy resolved actinometry for simultaneous measurement of atomic oxygen densities and local mean electron energies in radio-frequency driven plasmas

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Greb, Arthur; Niemi, Kari; O'Connell, Deborah; Gans, Timo;

A diagnostic method for the simultaneous determination of atomic oxygen densities and mean electron energies is demonstrated for an atmospheric pressure radio-frequency plasma jet. The proposed method is based on phase resolved optical emission measurements of the direc... View more
  • References (28)
    28 references, page 1 of 3

    1Plasma 2010 Committee, Plasma Science Committee, and Board on Physics and Astronomy, Plasma Science: Advancing Knowledge in the National Interest (The National Academies Press, Washington, DC, 2007).

    2A. Goehlich, T. Kawetzki, and H. F. Do€bele, J. Chem. Phys. 108, 9362 (1998).

    3K. Niemi, D. O'Connell, N. de Oliveira, D. Joyeux, L. Nahon, J. P. Booth, and T. Gans, Appl. Phys. Lett. 103, 034102 (2013).

    4W. R. Harshbarger, R. A. Porter, T. A. Miller, and P. Norton, Appl. Spectrosc. 31, 201 (1977).

    5J. W. Coburn and M. Chen, J. Appl. Phys. 51, 3134 (1980).

    6K. Niemi, V. Schulz-von der Gathen, and H. F. Do€bele, Plasma Sources Sci. Technol. 14, 375 (2005).

    7N. Sadeghi, D. W. Setser, A. Francis, U. Czarnetzki, and H. F. Do€bele, J. Chem. Phys. 115, 3144 (2001).

    8J. P. Booth, O. Joubert, J. Pelletier, and N. Sadeghi, J. Appl. Phys. 69, 618 (1991).

    9M. Adbel-Rahman, V. Schulz-von der Gathen, and T. Gans, Plasma Sources Sci. Technol. 15, 620 (2006).

    10H. M. Katsch, A. Tewes, A. Goehlich, T. Kawetzki, E. Quandt, and H. F. Do€bele, J. Appl. Phys. 88, 6232 (2000).

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