Mask assisted fabrication of nanoislands of BiFeO3 by ion beam milling

Article English OPEN
Morelli, A.; Johann, F.; Schammelt, N.; McGrouther, D.; Vrejiou, I.;
(2013)
  • Publisher: American Institute of Physics
  • Subject: QC

We report on a low-damage method for direct and rapid fabrication of arrays of epitaxial BiFeO3 (BFO) nanoislands. An array of aluminium dots is evaporated through a stencil mask on top of an epitaxial BiFeO3 thin film. Low energy focused ion beam milling of an area sev... View more
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