A Discharge-Based Pulse Technique for Probing the Energy Distribution of Positive Charges in Gate Dielectric

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Gao, R; Ji, Z; Zhang, JF; Zhang, WD; Hatta, SFWM; Niblock, J; Bachmayr, P; Stauffer, L; Wright, K; Greer, S;

Characterizing positive charges and its energy distribution in gate dielectric is useful for process qualification. A discharge-based technique is introduced to extract their energy distribution both within and beyond substrate band gap. This work investigates the diffi... View more
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