Nanocrystalline diamond for nano-electro-mechanical systems

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Thomas, Evan L. H.;
  • Subject: QC

Micro and Nano-Electro-Mechanical Systems (MEMS/NEMS) incorporating micro- and\ud nano-scale mechanical elements into electronic circuits are of increasing interest in both\ud fundamental physics and technological applications, with uses ranging from atomic resolution\u... View more
  • References (167)
    167 references, page 1 of 17

    2 Structure and Properties of Diamond 5 2.1 Structure of Diamond and Graphite . . . . . . . . . . . . . . . . . . . . 5 2.2 Synthesis of Diamond . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 2.2.1 High Pressure High Temperature . . . . . . . . . . . . . . . . . . 8 2.2.2 Detonation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 2.2.3 Chemical Vapour Deposition . . . . . . . . . . . . . . . . . . . . 13 2.3 Properties of Diamond . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

    3 Experimental Methods 18 3.1 Scanning Electron Microscopy . . . . . . . . . . . . . . . . . . . . . . . . 18 3.2 Atomic Force Microscopy . . . . . . . . . . . . . . . . . . . . . . . . . . 21 3.3 Raman Scattering . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23 3.4 X-ray Diffraction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26 3.5 Spectroscopic Ellipsometry . . . . . . . . . . . . . . . . . . . . . . . . . . 27 3.6 Spectral Reflectance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30 3.7 X-ray Photoelectron Spectroscopy . . . . . . . . . . . . . . . . . . . . . . 31 3.8 Chemical Vapour Deposition . . . . . . . . . . . . . . . . . . . . . . . . 33

    4 Spectroscopic Ellipsometry of Thin Film Diamond Growth 36 4.1 Spectroscopic Ellipsometry of Amorphous Carbon . . . . . . . . . . . . . 37 4.2 Previous Spectroscopic Ellipsometry Studies of Polycrystalline Diamond 45 4.2.1 Bulk Layer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45 4.2.2 Seed Layer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50 4.2.3 Microcrystalline Films . . . . . . . . . . . . . . . . . . . . . . . . 53

    1.1 Diamond doubly clamped resonator . . . . . . . . . . . . . . . . . . . . . 2

    2.1 Carbon electron configuration . . . . . . . . . . . . . . . . . . . . . . . . 6

    2.2 sp3 orbitals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

    2.3 Lattice of diamond and graphite . . . . . . . . . . . . . . . . . . . . . . 7

    2.4 Carbon phase diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

    2.5 Detonation nano-diamond . . . . . . . . . . . . . . . . . . . . . . . . . . 11

    2.6 Chemical vapour deposition model . . . . . . . . . . . . . . . . . . . . . 14

  • Bioentities (2)
    250d Protein Data Bank
    283d Protein Data Bank
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