Structure and properties of ZrN coatings deposited by high power impulse magnetron sputtering technology

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Purandare, Yashodhan; Ehiasarian, Arutiun; Hovsepian, Papken;
(2011)

Monolayer ZrN coatings were deposited exclusively by the novel High Power Impulse Magnetron Sputtering (HIPIMS) technology in an industrial scale PVD machine (HTC-1000-4 target system). Coatings were deposited on 1 micron polished M2 High speed steel, 304 L Stainless st... View more
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