Composition measurement of epitaxial ScxGa1-xN films

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Tsui, H.C.L.; Goff, L.E.; Barradas, N.P.; Alves, E.; Pereira, S.; Palgrave, R.G.; Davies, R.J.; Beere, H.E.; Farrer, I.; Ritchie, D.A.; Moram, M.A.;
(2016)
  • Publisher: IOP Publishing

Four different methods for measuring the compositions of epitaxial ScxGa1-xN films were assessed and compared to determine which was the most reliable and accurate. The compositions of epitaxial ScxGa1-xN films with 0 ≤ x ≤ 0.26 were measured directly using Rutherford b... View more
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