Dry friction between rough surfaces of silicon and functionalized gear microelectromechanical systems

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Almuramady, Nabeel;

Microelectromechanical systems (MEMS or micro-electro-mechanical systems) is a branch of nanotechnology studying microscopic devices, especially those with moving parts. Microgear MEMS is probably the most common type of MEMS that involves transmission of rotational mot... View more
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