Nano-scratch, nanoindentation and fretting tests of 5-80 nm ta-C films on Si(1 0 0)

Article English OPEN
Beake, BD; Davies, MI; Liskiewicz, TW; Vishnyakov, VM; Goodes, SR;
  • Publisher: Elsevier

Wear and stiction forces limit the reliability of Silicon-based micro-systems when mechanical contact occurs. Ultra-thin filtered cathodic vacuum arc (FCVA) ta-C films are being considered as protective overcoats for Si-based MEMS devices. Fretting, nano-scratch and nan... View more
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