Electroplating for high aspect ratio vias in PCB manufacturing: enhancement capabilities of acoustic streaming

Article English OPEN
Strusevich, Nadezhda; Desmulliez, Marc P.Y.; Abraham, Eitan; Flynn, David; Jones, Thomas; Patel, Mayur; Bailey, Christopher;
(2013)

This paper considers the copper electrodeposition processes in microvias and investigates whether the quality of the electroplating process can be improved by acoustic streaming using megasonic transducers placed into a plating cell. The theoretical results show that ac... View more
  • References (14)
    14 references, page 1 of 2

    [1] Strusevich N, Bailey C, Costello S, Patel M, Desmulliez MPY (2013) Numerical modeling of electroplating process for microvia fabrication. In: EuroSimE conference, Wroclaw, Poland, April 2013.

    [2] Andricacos PC, Uzoh C, Dukovic JO, Horcans J, Deligianni H (1998) Damascene copper electroplating for chip interconnects. IBM J Res Dev 42(5):567−574

    [3] Moffat TP,. Wheeler D, Kim S-K Josell D (2006) Curvature enhanced adsorbate coverage model for electrodeposition. JES 153(2):C127−C132

    [4] Frampton KD, Martin SE, Minor K (2003) The scaling of acoustic streaming for application in micro-fluidic devices. Appl Ac 64:681−692

    [5] Kirby BJ (2010) Micro- and nanoscale fluid mechanics: Transport in microfluidic devices. Cambridge University Press, Cambridge

    [6] Low CTJ, Roberts EPL, Walsh FC (2007) Numerical simulation of the current, potential and concentration distributions along the cathode of a rotating cylinder hull cell. Electrochem Acta 52:3831−3840

    [7] Wheeler D, Josell D, Moffat TP (2003) Modeling superconformal electrodeposition using the level set method. JES 150(5):C302−C310

    [8] PHYSICA, Multiphysics Software Ltd, London, 2000, http://www.multi-physics.com

    [9] Fang C (2011) Croissance electrolytique du cuivre appliquii a la technologie system in package. PhD thesis. University of Rennes, France

    [10] Lord Rayleigh (1945) The Theory of Sound. Dover, New York

  • Similar Research Results (1)
  • Related Organizations (4)
  • Metrics
Share - Bookmark