Microwave integrated circuits : preparation and measurement techniques for materials and components

Doctoral thesis English OPEN
Mehmet, Kemâl
  • Subject: TK
    arxiv: Physics::Optics | Condensed Matter::Materials Science

Microwave measurement of the properties of thin film dielectrics and lumped elements present difficulties because of the small volume of material involved. In this investigation both capacitively loaded coaxial cavities and capacitively loaded microstrip resonators were used.\ud \ud The dielectric properties of thin films were measured using symmetrical capacitively loaded coaxial cavities. The theoretical approaches are given for the design of the cavity and for the measurement techniques using (a) the VSWR method and (b) the perturbation method.\ud \ud The practical construction problems were overcome and highly stable. (mechanically as well as electrically) cavities were obtained. The measured electrical parameters of the cavities were very close to the theoretical values.\ud \ud Thin dielectric films were prepared using an electron beam evaporation source and an rfg sputtering unit. The properties of these films were measured using the capacitively loaded coaxial cavity. The thin film properties were correlated with the thin film deposition conditions.\ud \ud The dielectric properties of substrates used in the construction of mcrostrip transmission lines were measured on a sampling basis using a waveguide cavity technique. It was shown to be a most useful method •\ud \ud Capacitively loaded microstrip resonators were used to measure lumped elements at microwave frequencies. But' first the microstrip properties had to be measured. Very accurate techniques were introduced for measuring the effective dielectric constant and the capacitance of I a gap.in the strip of a microstrip, over a range of frequencies. Alumina, sapphire and quartz substrates were used in these measurements.\ud \ud The construction of .these resonators using thin film deposition and photolithographic techniques was·presented.\ud \ud It is considered that ·the use of these measurement techniques will contribute significantly to further advances in the field of m.i.c's.\ud
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