Materials optimization for magnetic MEMS

Article English OPEN
Gibbs, M.R.J. (2006)
  • Publisher: IEEE

By highlighting magnetomechanical effects such as the DeltaE-effect, and developing modeling code that integrates magnetoelasticity with microelectromechanical systems, it is shown that a simple cantilever system can have a sensitivity to mass loading at the attogram level. The requirements on the magnetoelastic materials for such devices are described, and progress towards achieving optimized material is reviewed. The possibility for deployment of such systems in security, healthcare, and bioscience is outlined
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