Boron-doped ultrananocrystalline diamond synthesized with an H-rich/Ar-lean gas system

Article English OPEN
Zeng, H ; Konicek, AR ; Moldovan, N ; Mangolini, F ; Jacobs, T ; Wylie, I ; Arumugam, PU ; Siddiqui, S ; Carpick, RW ; Carlisle, JA (2015)
  • Publisher: Elsevier

This paper reports the recent development and applications of conductive boron-doped ultrananocrystalline diamond (BD-UNCD). The authors have determined that BD-UNCD can be synthesized with an H-rich gaseous chemistry and a high CH4/H2 ratio, which is opposite to previously reported methods with Ar-rich or H-rich gas compositions but utilizing very low CH4/H2 ratios. The BD-UNCD reported here has a resistivity as low as 0.01 ohm cm, with low roughness (<10 nm) and a wide deposition temperature range (450–850 °C). The properties of this BD-UNCD were studied systematically using resistivity characterization, scanning and transmission electron microscopy, Raman spectroscopy, and roughness measurements. Near Edge X-ray Absorption Fine Structure (NEXAFS) spectroscopy confirms that up to 97% of the UNCD is deposited as sp3 carbon. These various measurements also reveal additional special properties for this material, such as an “M” shape Raman signature, line-granular nano-cluster texture and high Csingle bondH bond surface content. A hypothesis is provided to explain why this new deposition strategy, with H-rich/Ar-lean gas chemistry and a high CH4/H2 ratio, is able to produce high sp3-content and/or heavily doped UNCD. In addition, a few emerging applications of BD-UNCD in the field of atomic force microscopy, electrochemistry and biosensing are reviewed here.
  • References (29)
    29 references, page 1 of 3

    1. D. M. Gruen, S. Liu, A. R. Krauss, J. Luo, and X Pan, Fullerenes as precursors for diamond film growth without hydrogen or oxygen additions, Appl. Phys. Lett. 1994, 64, 1502-1504.

    2. S. Jiao, A. Sumant, M. A. Kirk, D. M. Gruen, A. R. Krauss, and O. Auciello, Microstructure of ultrananocrystalline diamond films grown by microwave Ar-CH4 plasma chemical vapor deposition with or without added H2, JOURNAL OF APPLIED PHYSICS 2001, 90, 118-122.

    3. A. R. Krauss, O. Auciello, M.Q. Ding, D. M. Gruen, Y.Huang, V. V. Zhironv, et al, Electron field emission for ultrananocrystalline diamond films, JOURNAL OF APPLIED PHYSICS 2001, 89, 2958-2967.

    4. D. M. Gruen, NANOCRYSTALLINE DIAMOND FILMS, Annu. Rev. Mater. Sci. 1999, 29, 211-259.

    5. O. Auciello, Are diamonds a MEMS' best friend? IEEE Microwave Magazine 2007, December, 61-75.

    6. D. M. Gruen, S. Liu, A. R. Krauss, and X. Pan, Buckyball microwave plasmas: Fragmentation and diamond-film growth, J. Appl. Phys. 1994, 75, 1758-1763.

    7. J. Philip, P. Hessa, T. Feygelson, J. E. Butler, S. Chattopadhyay, K. H. Chen, and L. C. Chen, Elastic, mechanical, and thermal properties of nanocrystalline diamond films, JOURNAL OF APPLIED PHYSICS 2003, 93, 2164-2171.

    8. M. N. R. Ashfold, P. W. May, C. A. Rego, N. M. Everitt, Thin Film Diamond by Chemical Vapour Deposition Methods, CHEMICAL SOCIETY REVIEWS 1994, 23, 21-30.

    9. Q. Chen, D. M. Gruen, A. R. Krauss, T. D. Corrigan, M. Witek, and G. M. Swain, Journal of The Electrochemical Society 2001, 148, E44-51.

    10. P. L. Hagans, P. M. Natishan, B. R. Stoner, and W. E. O'Gradya, Electrochemical Oxidation of Phenol Using Boron-Doped Diamond Electrodes, Journal of The Electrochemical Society 2001, 148, E298-E301.

  • Metrics
    views in OpenAIRE
    views in local repository
    downloads in local repository

    The information is available from the following content providers:

    From Number Of Views Number Of Downloads
    White Rose Research Online - IRUS-UK 0 120