Electrical resistivity of CuAlMo thin films grown at room temperature by dc magnetron sputtering

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Birkett, Martin; Penlington, Roger;

We report on the thickness dependence of electrical resistivity of CuAlMo films grown by dc magnetron sputtering on glass substrates at room temperature. The electrical resistance of the films was monitored in situ during their growth in the thickness range 10–1000 nm. ... View more
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