Library collections are mostly made of porous cellulose-based materials such as papers and textiles. Fine particles (< 1 μm), representing up to 90% of particulate matter (PM) mass in libraries and archives, deposit on book surfaces and can also penetrate into small openings, including interfiber spaces. These particles can cause degradation of archival documents and therefore is necessary to clean them. An alternative method of cleaning by the CO2 snow jet was tested and compared with traditional mechanical dry cleaning techniques. Different types of papers and textiles commonly used in library collections were treated by the jet using a developed automatic system with well-defined operating parameters. Measurements included the influence on particle removal efficiency and possible degradation. Results revealed that the jet was effective in removing submicron particles, including those embedded in the fibrous surface. In contrast, the mechanical dry cleaning methods were almost ineffective for these particles.